Resistless EUV lithography: photon-induced oxide patterning on silicon

MLA

Tseng, Li-Ting, et al. Resistless EUV Lithography: Photon-Induced Oxide Patterning on Silicon. 2023. EBSCOhost, https://doi.org/10.1126/sciadv.adf5997.

APA

Tseng, L.-T., Karadan, P., Kazazis, D., Constantinou, P. C., Stock, T. J. Z., Curson, N. J., Schofield, S. R., Muntwiler, M., Aeppli, G., & Ekinci, Y. (2023). Resistless EUV lithography: photon-induced oxide patterning on silicon. https://doi.org/10.1126/sciadv.adf5997

Chicago

Tseng, Li-Ting, Prajith Karadan, Dimitrios Kazazis, Procopios C. Constantinou, Taylor J. Z. Stock, Neil J. Curson, Steven R. Schofield, Matthias Muntwiler, Gabriel Aeppli, and Yasin Ekinci. 2023. “Resistless EUV Lithography: Photon-Induced Oxide Patterning on Silicon.” doi:10.1126/sciadv.adf5997.