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Observation and manipulation of charge carrier distribution at the SiO$_2$/Si interface

Authors :
Martins, Maria M.
Kumar, Piyush
Bathen, Marianne E.
Salman, Zaher
Grossner, Ulrike
Prokscha, Thomas
Publication Year :
2024

Abstract

Using low-energy muons, we map the charge carrier concentration as a function of depth and electric field across the \SiOSi interface up to a depth of \SI{100}{\nano\meter} in Si-based MOS capacitors. The results show that the formation of the anisotropic bond-centered muonium \MuBCz state in Si serves as a direct measure of the local changes in electronic structures. Different band-bending conditions could be distinguished, and the extension of the depletion width was directly extracted using the localized stopping and probing depth of the muons. Furthermore, electron build-up on the Si side of the \SiOO/Si interface, caused by the mirror charge induced by the fixed positive charge in the oxide and the image force effect, was observed. Our work represents a significant extension of the application of the muon spin rotation technique ($\mu$SR) and lays the foundation for further research on direct observation of charge carrier density manipulation at technologically important semiconductor device interfaces.

Details

Database :
arXiv
Publication Type :
Report
Accession number :
edsarx.2405.18211
Document Type :
Working Paper