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Active Compensation of Position Dependent Flexible Dynamics in High-Precision Mechatronics
- Publication Year :
- 2024
-
Abstract
- Growing demands in the semiconductor industry necessitate increasingly stringent requirements on throughput and positioning accuracy of lithographic equipment. Meeting these demands involves employing highly aggressive motion profiles, which introduce position-dependent flexible dynamics, thus compromising achievable position tracking performance. This paper introduces a control approach enabling active compensation of position-dependent flexible dynamics by extending the conventional rigid-body control structure to include active control of flexible dynamics. To facilitate real-time implementation of the control algorithm, appropriate position-dependent weighting functions are introduced, ensuring computationally efficient execution of the proposed approach. The efficacy of the proposed control design approach is demonstrated through experiments conducted on a state-of-the-art extreme ultraviolet (EUV) wafer stage.<br />Comment: 7 pages, 7 Figures
- Subjects :
- Electrical Engineering and Systems Science - Systems and Control
37M15
J.2
G.2.0
Subjects
Details
- Database :
- arXiv
- Publication Type :
- Report
- Accession number :
- edsarx.2408.03642
- Document Type :
- Working Paper