Micro-electro-mechanical systems and nanotechnology

Micro-Electro-Mechanical-System (MEMS) and Nanotechnology have both received significant attention in recent years due to their potential for manufacturing highly miniaturised devices which consume less raw materials and energy in their production, and function with greater efficiency, speed, and reliability. The first project described in this thesis concerns the development of a novel, low cost, contamination-free nanofabrication system. This system is enabled by a MEMS-based device which has the dual functions of a high-precision AFM (Atomic Force Microscope) cantilever probe and a shadow mask. This MEMS device, which is referred to as the Nanostencil device in this thesis, has been integrated with nanoscale apertures and an AFM scanning tip using the Focussed Ion Beam (FIB) technique. The finished Nanostencil device has been used successfully for both parallel nanoscale depositions and high precision nanoscale alignments. The second project presented in this thesis is concerned with the application of MEMS technology to benefit the aircraft industry by providing a compact and robust pressure sensor capable of measuring high frequency turbulent flow velocities with improved accuracy. The information provided by such probes could be of considering help in improving the design of the next generation of aeroplanes. With the help of finite-element analysis, a pressure sensor has been designed which has a footprint of 0.7 mm, a frequency response of a few megahertz and a high thermal stability. The fabrication of this prototype has been realised through a specially developed process sequence utilising a Deep Reactive-Ion-Etching (DRIE) system. Mechanical testing of the deflection versus pressure response of the sensor provides preliminary indications that the fabricated device meets the design requirements.