Back to Search
Start Over
Heterogenous integration of diamond with non-native substrates
- Publication Year :
- 2019
- Publisher :
- University of Strathclyde, 2019.
-
Abstract
- This thesis addresses the challenges with utilising diamond for integrated optical devices; a platform where its impressive material properties can be exploited. The major objective was to develop a process by which diamond could be heterogeneously integrated with non-native device platforms, to overcome its limited geometry. A process was developed for fabrication, handling, and hybrid integration of ultra thin diamond membranes. Plasma-etch chemistries were developed, that enabled such processing, and provided sub-nm r.m.s. roughness. Two sets of monolithic diamond structures were fabricated and transfer printed with a thickness down to ~10 nm. For thickness characterisation, diamond platelets, finding a low local-variation across typical device geometries. Diamond resonator devices were also fabricated and when integrated with SOI waveguides they showed high Q-factors as large as 1.8 x 10⁵. Thermo-optic tuning of these devices by > 450 pm at low mW powers was demonstrated, which has great significance to all integrated optical fields where resonant frequency of a cavity is important. The techniques developed are independent of integration platforms and are of wide reaching relevance to the optics community.
- Subjects :
- 621.36
Subjects
Details
- Language :
- English
- Database :
- British Library EThOS
- Publication Type :
- Dissertation/ Thesis
- Accession number :
- edsble.793467
- Document Type :
- Electronic Thesis or Dissertation
- Full Text :
- https://doi.org/10.48730/09eq-dw96