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New Volatile Tantalum Imido Precursors with Carboxamide Ligands
- Source :
- ACS Omega, Vol 6, Iss 38, Pp 24795-24802 (2021)
- Publication Year :
- 2021
- Publisher :
- American Chemical Society, 2021.
Details
- Language :
- English
- ISSN :
- 24701343
- Volume :
- 6
- Issue :
- 38
- Database :
- Directory of Open Access Journals
- Journal :
- ACS Omega
- Publication Type :
- Academic Journal
- Accession number :
- edsdoj.021cdd4cf14426199db81fc769d3b1c
- Document Type :
- article
- Full Text :
- https://doi.org/10.1021/acsomega.1c03659