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Piezo-optomechanical cantilever modulators for VLSI visible photonics
- Source :
- APL Photonics, Vol 7, Iss 5, Pp 051304-051304-7 (2022)
- Publication Year :
- 2022
- Publisher :
- AIP Publishing LLC, 2022.
-
Abstract
- Visible-wavelength very large-scale integration photonic circuits have a potential to play important roles in quantum information and sensing technologies. The realization of scalable, high-speed, and low-loss photonic mesh circuits depends on reliable and well-engineered visible photonic components. Here, we report a low-voltage optical phase shifter based on piezo-actuated mechanical cantilevers, fabricated on a CMOS compatible, 200 mm wafer-based visible photonics platform. We show linear phase and amplitude modulation with 6 Vπ cm in differential operation, −1.5 to −2 dB insertion loss, and up to 40 dB contrast in the 700–780 nm range. By adjusting selected cantilever parameters, we demonstrate a low-displacement and a high-displacement device, both exhibiting a nearly flat frequency response from DC to a peak mechanical resonance at 23 and 6.8 MHz respectively, which, through resonant enhancement of Q ∼ 40, further decreases the operating voltage down to 0.15 Vπ cm.
- Subjects :
- Applied optics. Photonics
TA1501-1820
Subjects
Details
- Language :
- English
- ISSN :
- 23780967
- Volume :
- 7
- Issue :
- 5
- Database :
- Directory of Open Access Journals
- Journal :
- APL Photonics
- Publication Type :
- Academic Journal
- Accession number :
- edsdoj.02bda3b5d6764afb899b907f92f9d02a
- Document Type :
- article
- Full Text :
- https://doi.org/10.1063/5.0088424