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Piezo-optomechanical cantilever modulators for VLSI visible photonics

Authors :
Mark Dong
David Heim
Alex Witte
Genevieve Clark
Andrew J. Leenheer
Daniel Dominguez
Matthew Zimmermann
Y. Henry Wen
Gerald Gilbert
Dirk Englund
Matt Eichenfield
Source :
APL Photonics, Vol 7, Iss 5, Pp 051304-051304-7 (2022)
Publication Year :
2022
Publisher :
AIP Publishing LLC, 2022.

Abstract

Visible-wavelength very large-scale integration photonic circuits have a potential to play important roles in quantum information and sensing technologies. The realization of scalable, high-speed, and low-loss photonic mesh circuits depends on reliable and well-engineered visible photonic components. Here, we report a low-voltage optical phase shifter based on piezo-actuated mechanical cantilevers, fabricated on a CMOS compatible, 200 mm wafer-based visible photonics platform. We show linear phase and amplitude modulation with 6 Vπ cm in differential operation, −1.5 to −2 dB insertion loss, and up to 40 dB contrast in the 700–780 nm range. By adjusting selected cantilever parameters, we demonstrate a low-displacement and a high-displacement device, both exhibiting a nearly flat frequency response from DC to a peak mechanical resonance at 23 and 6.8 MHz respectively, which, through resonant enhancement of Q ∼ 40, further decreases the operating voltage down to 0.15 Vπ cm.

Details

Language :
English
ISSN :
23780967
Volume :
7
Issue :
5
Database :
Directory of Open Access Journals
Journal :
APL Photonics
Publication Type :
Academic Journal
Accession number :
edsdoj.02bda3b5d6764afb899b907f92f9d02a
Document Type :
article
Full Text :
https://doi.org/10.1063/5.0088424