Planar and ridge waveguides prepared by ion implantation and femtosecond laser ablation in Er3+-doped germanate glasses

The work reports the hydrogen-ion implantation and femtosecond laser ablation in the Er3+-doped germanate glass to make planar and ridge optical waveguides. The energy is 400 keV and the dose is 6 × 1016 ion/cm2 for the ion implantation. The pulse energy is 3 μJ and the scanning speed is 50 μm/s for the femtosecond laser ablation. A microscope is used to observe the cross-section morphologies of the planar and ridge waveguides. A measurement of the near-field intensity distribution at 632.8 nm is performed by the end-face coupling system. The effective refractive indices of the propagation modes are recorded by the m-line technique. It’s the first time that a ridge waveguide is fabricated in the Er3+-doped germanate glass by the proton implantation and femtosecond laser ablation, which is with potential application as new integrated optical devices.