Location Dependence of Mass Sensitivity for Acoustic Wave Devices

It is introduced that the mass sensitivity (Sm) of an acoustic wave (AW) device with a concentrated mass can be simply determined using its mode shape function: the Sm is proportional to the square of its mode shape. By using the Sm of an AW device with a uniform mass, which is known for almost all AW devices, the Sm of an AW device with a concentrated mass at different locations can be determined. The method is confirmed by numerical simulation for one type of AW device and the results from two other types of AW devices.