Highly sensitive and robust 3C-SiC/Si pressure sensor with stress amplification structure

MLA

Braiden Tong, et al. “Highly Sensitive and Robust 3C-SiC/Si Pressure Sensor with Stress Amplification Structure.” Materials & Design, vol. 224, no. 111297-, Dec. 2022. EBSCOhost, https://doi.org/10.1016/j.matdes.2022.111297.

APA

Braiden Tong, Tuan-Hung Nguyen, Hong-Quan Nguyen, Tuan-Khoa Nguyen, Thanh Nguyen, Toan Dinh, Ngo Vo Ke Thanh, Truong Huu Ly, Nguyen Chi Cuong, Hoang Ba Cuong, Trinh Xuan Thang, Van Thanh Dau, & Dzung Viet Dao. (2022). Highly sensitive and robust 3C-SiC/Si pressure sensor with stress amplification structure. Materials & Design, 224(111297-). https://doi.org/10.1016/j.matdes.2022.111297

Chicago

Braiden Tong, Tuan-Hung Nguyen, Hong-Quan Nguyen, Tuan-Khoa Nguyen, Thanh Nguyen, Toan Dinh, Ngo Vo Ke Thanh, et al. 2022. “Highly Sensitive and Robust 3C-SiC/Si Pressure Sensor with Stress Amplification Structure.” Materials & Design 224 (111297-). doi:10.1016/j.matdes.2022.111297.