All-inorganic ultrathin high-sensitivity transparent temperature sensor based on a Mn-Co-Ni-O nanofilm

Abstract The demand for optically transparent temperature sensors in intelligent devices is increasing. However, the performance of these sensors, particularly in terms of their sensitivity and resolution, must be further enhanced. This study introduces a novel transparent and highly sensitive temperature sensor characterized by its ultrathin, freestanding design based on a Mn-Co-Ni-O nanofilm. The Mn-Co-Ni-O-based sensor exhibits remarkable sensitivity, with a temperature coefficient of resistance of −4% °C−1, and can detect minuscule temperature fluctuations as small as 0.03 °C. Additionally, the freestanding sensor can be transferred onto any substrate for versatile application while maintaining robust structural stability and excellent resistance to interference, indicating its suitability for operation in challenging environments. Its practical utility in monitoring the surface temperature of optical devices is demonstrated through vertical integration of the sensor and a micro light-emitting diode on a polyimide substrate. Moreover, an experiment in which the sensor is implanted in rats confirms its favorable biocompatibility, highlighting the promising applications of the sensor in the biomedical domain.