Back to Search
Start Over
Si metasurface half-wave plates demonstrated on a 12-inch CMOS platform
- Source :
- Nanophotonics, Vol 9, Iss 1, Pp 149-157 (2019)
- Publication Year :
- 2019
- Publisher :
- De Gruyter, 2019.
-
Abstract
- Half-wave plate (HWP) is one of the key polarization controlling devices in optical systems. The conventional HWPs based on birefringent crystals are inherently bulky and difficult to be monolithically integrated with other optical components. In this work, metasurface-based HWPs with high compactness are demonstrated on a 12-inch silicon complementary metal-oxide-semiconductor platform. Three-dimensional finite difference time domain simulation is used to design the nanostructure and investigate the impact of fabrication process variation on the device performance. In addition, the cross- and co-polarization transmittance (Tcross and Tco) of the HWPs located at different wafer locations are characterized experimentally. The peak Tcross and valley Tco values of 0.69 ± 0.053 and 0.032 ± 0.005 are realized at the wavelength around 1.7 μm, respectively. This corresponds to a polarization conversion efficiency of 95.6% ± 0.8%.
- Subjects :
- flat optics
metasurface
polarization control
waveplate
Physics
QC1-999
Subjects
Details
- Language :
- English
- ISSN :
- 21928606 and 21928614
- Volume :
- 9
- Issue :
- 1
- Database :
- Directory of Open Access Journals
- Journal :
- Nanophotonics
- Publication Type :
- Academic Journal
- Accession number :
- edsdoj.2ad68720a554b3980989e01063f181c
- Document Type :
- article
- Full Text :
- https://doi.org/10.1515/nanoph-2019-0364