4H silicon carbide bulk acoustic wave gyroscope with ultra-high Q-factor for on-chip inertial navigation

MLA

Zhenming Liu, et al. “4H Silicon Carbide Bulk Acoustic Wave Gyroscope with Ultra-High Q-Factor for on-Chip Inertial Navigation.” Communications Engineering, vol. 3, no. 1, June 2024, pp. 1–9. EBSCOhost, https://doi.org/10.1038/s44172-024-00234-z.

APA

Zhenming Liu, Yaoyao Long, Charlotte Wehner, Haoran Wen, & Farrokh Ayazi. (2024). 4H silicon carbide bulk acoustic wave gyroscope with ultra-high Q-factor for on-chip inertial navigation. Communications Engineering, 3(1), 1–9. https://doi.org/10.1038/s44172-024-00234-z

Chicago

Zhenming Liu, Yaoyao Long, Charlotte Wehner, Haoran Wen, and Farrokh Ayazi. 2024. “4H Silicon Carbide Bulk Acoustic Wave Gyroscope with Ultra-High Q-Factor for on-Chip Inertial Navigation.” Communications Engineering 3 (1): 1–9. doi:10.1038/s44172-024-00234-z.