High-Speed Design with Separated Tapering for Reducing Cogging Torque and Torque Ripple of a 3 kW Dry Vacuum Pump Motor for the ETCH Process

This paper proposes a design method to reduce cogging torque and torque ripple in the concentrated winding of IPMSMs (Interior Permanent Magnet Synchronous Motors) used in motors for the semiconductor ETCH process. IPMSMs can utilize reluctance torque through the difference in inductance between the d axis and q axis, but they are at a disadvantage in terms of reducing cogging torque while tapering the rotor and stator to reduce torque ripple. In addition, the existing single tapering can push the permanent magnets into the rotor. If the rotor’s permanent magnets are embedded, the magnetic reluctance will increase, and the overall performance of the motor will decrease. However, an optimum design method was derived in which the magnets do not move during rotor tapering. This geometric design is an optimum design method that reduces cogging torque and torque ripple. This paper compares and analyzes four models, the concentrated winding model, distributed winding model, conventional tapering model, and separated tapering model, using 2D and 3D finite element analysis (FEA).