Bending 90° Waveguides in Nd:YAG Crystal Fabricated by a Combination of Femtosecond Laser Inscription and Precise Diamond Blade Dicing

In this paper, a low-loss 90°-bending design in femtosecond laser-induced double-line waveguides is theoretically proposed and experimentally demonstrated. The bending is realized based on the total internal reflection of a corner mirror (made by precise diamond blade dicing) located at the intersection of a pair of waveguides perpendicular to each other. The waveguide bending performance was birefringence free, with the insertion loss of each bending below 0.8 dB. This method provides great flexibility and has great potential for the design of integrated photonics based on femtosecond laser-inscribed crystalline materials.