Technology and performances of silicon oxynitride waveguides for optomechanical sensors fabricated by plasma-enhanced chemical vapour deposition

MLA

Sabac A., et al. “Technology and Performances of Silicon Oxynitride Waveguides for Optomechanical Sensors Fabricated by Plasma-Enhanced Chemical Vapour Deposition.” Journal of the European Optical Society-Rapid Publications, vol. 2, Jan. 2007, p. 07026. EBSCOhost, https://doi.org/10.2971/jeos.2007.07026.

APA

Sabac A., Gorecki C., Jozwik M., Nieradko L., Meunier C., & Gut K. (2007). Technology and performances of silicon oxynitride waveguides for optomechanical sensors fabricated by plasma-enhanced chemical vapour deposition. Journal of the European Optical Society-Rapid Publications, 2, 07026. https://doi.org/10.2971/jeos.2007.07026

Chicago

Sabac A., Gorecki C., Jozwik M., Nieradko L., Meunier C., and Gut K. 2007. “Technology and Performances of Silicon Oxynitride Waveguides for Optomechanical Sensors Fabricated by Plasma-Enhanced Chemical Vapour Deposition.” Journal of the European Optical Society-Rapid Publications 2 (January): 07026. doi:10.2971/jeos.2007.07026.