Micro 3D printing of a functional MEMS accelerometer

MLA

Simone Pagliano, et al. “Micro 3D Printing of a Functional MEMS Accelerometer.” Microsystems & Nanoengineering, vol. 8, no. 1, Sept. 2022, pp. 1–11. EBSCOhost, https://doi.org/10.1038/s41378-022-00440-9.

APA

Simone Pagliano, David E. Marschner, Damien Maillard, Nils Ehrmann, Göran Stemme, Stefan Braun, Luis Guillermo Villanueva, & Frank Niklaus. (2022). Micro 3D printing of a functional MEMS accelerometer. Microsystems & Nanoengineering, 8(1), 1–11. https://doi.org/10.1038/s41378-022-00440-9

Chicago

Simone Pagliano, David E. Marschner, Damien Maillard, Nils Ehrmann, Göran Stemme, Stefan Braun, Luis Guillermo Villanueva, and Frank Niklaus. 2022. “Micro 3D Printing of a Functional MEMS Accelerometer.” Microsystems & Nanoengineering 8 (1): 1–11. doi:10.1038/s41378-022-00440-9.