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Fabrication of dense non-circular nanomagnetic device arrays using self-limiting low-energy glow-discharge processing.
- Source :
- PLoS ONE, Vol 8, Iss 8, p e73083 (2013)
- Publication Year :
- 2013
- Publisher :
- Public Library of Science (PLoS), 2013.
-
Abstract
- We describe a low-energy glow-discharge process using reactive ion etching system that enables non-circular device patterns, such as squares or hexagons, to be formed from a precursor array of uniform circular openings in polymethyl methacrylate, PMMA, defined by electron beam lithography. This technique is of a particular interest for bit-patterned magnetic recording medium fabrication, where close packed square magnetic bits may improve its recording performance. The process and results of generating close packed square patterns by self-limiting low-energy glow-discharge are investigated. Dense magnetic arrays formed by electrochemical deposition of nickel over self-limiting formed molds are demonstrated.
Details
- Language :
- English
- ISSN :
- 19326203
- Volume :
- 8
- Issue :
- 8
- Database :
- Directory of Open Access Journals
- Journal :
- PLoS ONE
- Publication Type :
- Academic Journal
- Accession number :
- edsdoj.5b1c1792ba4e40a1b168e9670fdc25ad
- Document Type :
- article
- Full Text :
- https://doi.org/10.1371/journal.pone.0073083