Noble metal alloy thin films by atomic layer deposition and rapid Joule heating

MLA

Yuanyuan Guo, et al. “Noble Metal Alloy Thin Films by Atomic Layer Deposition and Rapid Joule Heating.” Scientific Reports, vol. 12, no. 1, Feb. 2022, pp. 1–9. EBSCOhost, https://doi.org/10.1038/s41598-022-06595-9.

APA

Yuanyuan Guo, Yiming Zou, Chunyu Cheng, Leyan Wang, Riko I Made, Ronn Goei, Kwan Wee Tan, Shuzhou Li, & Alfred Iing Yoong Tok. (2022). Noble metal alloy thin films by atomic layer deposition and rapid Joule heating. Scientific Reports, 12(1), 1–9. https://doi.org/10.1038/s41598-022-06595-9

Chicago

Yuanyuan Guo, Yiming Zou, Chunyu Cheng, Leyan Wang, Riko I Made, Ronn Goei, Kwan Wee Tan, Shuzhou Li, and Alfred Iing Yoong Tok. 2022. “Noble Metal Alloy Thin Films by Atomic Layer Deposition and Rapid Joule Heating.” Scientific Reports 12 (1): 1–9. doi:10.1038/s41598-022-06595-9.