Novel abrasive-free jet polishing for Bulk single-crystal KDP with a low viscosity microemulsion

Abstract In present work, the abrasive-free jet polishing (AFJP) of bulk single-crystal KDP was first fulfilled, when using a newly-designed low-viscosity microemulsion as the AFJP fluid. The novel AFJP fluid shows a typical water-in-oil structure, in which the water cores uniformly distribute in the BmimPF6 IL, with a particle size of about 20–25 nm. What’s more, the AFJP fluid is a controllable and selective non-abrasive jet fluid that the shape of the removal function is regular and smooth, presenting a similar Gaussian function, meanwhile, the dispersion coefficient of the removal rate is only 1.9%. Finally, the surface quality of the bulk single-crystal KDP is further improved by AFJP, meanwhile, the subsurface damage is first obviously mitigated.