Multidirectional UV-LED lithography using an array of high-intensity UV-LEDs and tilt-rotational sample holder for 3-D microfabrication

MLA

Sabera Fahmida Shiba, et al. “Multidirectional UV-LED Lithography Using an Array of High-Intensity UV-LEDs and Tilt-Rotational Sample Holder for 3-D Microfabrication.” Micro and Nano Systems Letters, vol. 8, no. 1, Apr. 2020, pp. 1–12. EBSCOhost, https://doi.org/10.1186/s40486-020-00107-y.

APA

Sabera Fahmida Shiba, Jun Ying Tan, & Jungkwun Kim. (2020). Multidirectional UV-LED lithography using an array of high-intensity UV-LEDs and tilt-rotational sample holder for 3-D microfabrication. Micro and Nano Systems Letters, 8(1), 1–12. https://doi.org/10.1186/s40486-020-00107-y

Chicago

Sabera Fahmida Shiba, Jun Ying Tan, and Jungkwun Kim. 2020. “Multidirectional UV-LED Lithography Using an Array of High-Intensity UV-LEDs and Tilt-Rotational Sample Holder for 3-D Microfabrication.” Micro and Nano Systems Letters 8 (1): 1–12. doi:10.1186/s40486-020-00107-y.