Back to Search Start Over

In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection

Authors :
Andi Setiono
Maik Bertke
Wilson Ombati Nyang’au
Jiushuai Xu
Michael Fahrbach
Ina Kirsch
Erik Uhde
Alexander Deutschinger
Ernest J. Fantner
Christian H. Schwalb
Hutomo Suryo Wasisto
Erwin Peiner
Source :
Sensors, Vol 20, Iss 3, p 618 (2020)
Publication Year :
2020
Publisher :
MDPI AG, 2020.

Abstract

In this study, we investigate the performance of two piezoresistive micro-electro-mechanical system (MEMS)-based silicon cantilever sensors for measuring target analytes (i.e., ultrafine particulate matters). We use two different types of cantilevers with geometric dimensions of 1000 × 170 × 19.5 µm3 and 300 × 100 × 4 µm3, which refer to the 1st and 2nd types of cantilevers, respectively. For the first case, the cantilever is configured to detect the fundamental in-plane bending mode and is actuated using a resistive heater. Similarly, the second type of cantilever sensor is actuated using a meandering resistive heater (bimorph) and is designed for out-of-plane operation. We have successfully employed these two cantilevers to measure and monitor the changes of mass concentration of carbon nanoparticles in air, provided by atomizing suspensions of these nanoparticles into a sealed chamber, ranging from 0 to several tens of µg/m3 and oversize distributions from ~10 nm to ~350 nm. Here, we deploy both types of cantilever sensors and operate them simultaneously with a standard laboratory system (Fast Mobility Particle Sizer, FMPS, TSI 3091) as a reference.

Details

Language :
English
ISSN :
14248220
Volume :
20
Issue :
3
Database :
Directory of Open Access Journals
Journal :
Sensors
Publication Type :
Academic Journal
Accession number :
edsdoj.6dcd199812840e9b5aefb2cd003d49a
Document Type :
article
Full Text :
https://doi.org/10.3390/s20030618