Fabrication of ZnO nanorods based gas sensor pattern by photolithography and lift off techniques

In this paper, mainly focused on the fabrication of ZnO nanorod based gas sensor. This sensor was aimed to detect a small amount of volatile organic compounds (VOCs) with low power, low cost and simple manufacturing method. Low power consumption is achievable by completion of metal oxide sensors. So, high sensitivity of sensor is requested to sense the target gas. It is important to find out optimal sensing structures of materials. The components of sensor were platinum electrode and heater and ZnO sensing film. SiO2 was used as thermal and electricity insulator. Herein, the ZnO nanorods was synthesized by wet chemical method, namely chemical bath deposition(CBD) and hydrothermal method (HD), were tried to check well alignment of ZnO nanorods on the sensing area. Morphology of sensing material and sensor pattern was analyzed by Scanning Electron Microscope (SEM) and EDS, phase analysis was carried out using X-ray Diffractometer (XRD). The morphology images of ZnO confirmed the formation of nanorod like structure with average diameter of 205 nm and 55 nm chemical bath deposition(CBD) and hydrothermal method (HD), respectively. Therefore, the fabricated ZnO nanorod based gas sensor device is suitable for human breath analysis.Capsule: This work investigates the fabrication of ZnO nanorods based gas sensor pattern.