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The NO2 sensing ITO thin films prepared by ultrasonic spray pyrolysis

Authors :
Jianzhong Gu
Minghua Lu
Zheng Qin
Minghong Wu
Zheng Jiao
Source :
Sensors, Vol 3, Iss 8, Pp 285-289 (2003)
Publication Year :
2003
Publisher :
MDPI AG, 2003.

Abstract

In this paper ITO thin films were deposited on alumina substrates by ultrasonic spray pyrolysis. The NO2 sensing properties of ITO thin films were investigated. The results show ITO thin films have good sensitivity to nitrogen dioxide.

Details

Language :
English
ISSN :
30800285 and 14248220
Volume :
3
Issue :
8
Database :
Directory of Open Access Journals
Journal :
Sensors
Publication Type :
Academic Journal
Accession number :
edsdoj.8a36311182a4771bdc1b20e1af943ff
Document Type :
article
Full Text :
https://doi.org/10.3390/s30800285