Study on sinusoidal estimation deviation of electrostatic actuated MEMS mirror torsion angle

Electrostatic MEMS micromirrors usually work in resonant state to obtain large amplitude of torsion angle. The real-time prediction of MEMS micromirror torsion angle is calculated according to the measured resonant amplitude and phase under the assumption that the relationship between the torsion angle and time is sinusoidal. However, there are few reports on the deviation of this torsion angle predication based on sinusoidal assumption. In this paper, the real resonant torsion trajectory of C1100 MEMS micromirror under different driving frequencies and voltages is measured by using microscopic laser Doppler method, and the deviation between the real trajectory and the trajectory fitted by sinusoidal curve is compared. The results show that the real trajectory of the MEMS micromirror driven by square wave is not completely consistent with the sinusoidal estimation, and the deviation increases with the increase of the torsional angle amplitude. By obtaining the frequency domain components of the torsion angle signal using FFT method, the main reason of this prediction deviation is due to composition of harmonic signals on base frequency signal. The research results reveal that the sinusoidal assumption method is only suitable for situations when the optical angle accuracy is less than 0.1°.