Compact Modeling of Surface Potential, Drain Current and Terminal Charges in Negative Capacitance Nanosheet FET including Quasi-Ballistic Transport

In this article, we propose a compact model for Negative Capacitance Nanosheet Field Effect Transistor (NC-NSFET) including quasi-ballistic transport for sub-7nm technology node. The model captures the electrical characteristics of NC-NSFET for different ferroelectric thicknesses. Further, it captures the reverse short channel effects of NCFET for different channel lengths with a single set of parameters. Also, we build a model for terminal charges of NC-NSFET using the core model and the earlier developed inner fringing charge model. Using our physics-based model, we find that quasi ballistic transport worsens the capacitance matching in NCFET compared to drift-diffusion only case. We validate the compact model for the drain current and the terminal charges with the TCAD results. The proposed compact model is computationally efficient and implemented in the Verilog-A code to enable SPICE circuit simulations. Finally, we demonstrate this by applying our model for NC-NSFET based CMOS inverter and SRAM circuit implementations in SPICE.