Evaluation of electron ionization cross-sections of CFCl3 molecule by using a semi-empirical approach

In the present paper, we have investigated partial and total electron ionization cross-sections for CFCl3 molecule from ionization threshold to 5 keV incident electron energy using a modified Jain-Khare semi-empirical approach. The present results of ionization cross-sections show good agreement with available data sets. We also have investigated the ionization rate coefficients for its partial and total ionization cross-sections. The first time we have investigated single differential cross-sections at constant incident energies and double differential cross-sections at different incident energies and different incident angles. No other data of differential cross-sections are available to date for comparison to our results.