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A highly CMOS compatible hafnia-based ferroelectric diode

Authors :
Qing Luo
Yan Cheng
Jianguo Yang
Rongrong Cao
Haili Ma
Yang Yang
Rong Huang
Wei Wei
Yonghui Zheng
Tiancheng Gong
Jie Yu
Xiaoxin Xu
Peng Yuan
Xiaoyan Li
Lu Tai
Haoran Yu
Dashan Shang
Qi Liu
Bing Yu
Qiwei Ren
Hangbing Lv
Ming Liu
Source :
Nature Communications, Vol 11, Iss 1, Pp 1-8 (2020)
Publication Year :
2020
Publisher :
Nature Portfolio, 2020.

Abstract

Designing reliable, scalable and high speed computing systems remains a challenge. Here, the authors identify noncentrosymmetric orthorhombic phase in HZO film and demonstrate a CMOS compatible 3D Vertical HZO-based ferroelectric diode array with self-selective property and 20 ns of speed operation.

Subjects

Subjects :
Science

Details

Language :
English
ISSN :
20411723
Volume :
11
Issue :
1
Database :
Directory of Open Access Journals
Journal :
Nature Communications
Publication Type :
Academic Journal
Accession number :
edsdoj.f2f741492abf4ccca22fd4e425a534c9
Document Type :
article
Full Text :
https://doi.org/10.1038/s41467-020-15159-2