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Three-dimensional integration: technology, use, and issues for mixed-signal applications

Authors :
Xue, Lei
Liu, Christianto C.
Kim, Hong-Seung
Kim. Sang "Kevin"
Tiwari, Sandip
Source :
IEEE Transactions on Electron Devices. March, 2003, Vol. 50 Issue 3, p601, 9 p.
Publication Year :
2003

Abstract

A low-thermal-budget 3-D fabrication technique for mixed-signal applications is described and discussed.

Details

Language :
English
ISSN :
00189383
Volume :
50
Issue :
3
Database :
Gale General OneFile
Journal :
IEEE Transactions on Electron Devices
Publication Type :
Academic Journal
Accession number :
edsgcl.109227582