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Ferroelectric emission studies for electron emission lithography applications
- Source :
- IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. Oct, 2003, Vol. 50 Issue 10, p1247, 6 p.
- Publication Year :
- 2003
-
Abstract
- Ferroelectric swithing emission, dielectric switching emission, and pyroelectric emission are investigated and discussed.
Details
- Language :
- English
- ISSN :
- 08853010
- Volume :
- 50
- Issue :
- 10
- Database :
- Gale General OneFile
- Journal :
- IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.110014925