Effect of nonthermal plasma reactor for C[F.sub.4] decomposition

In this paper, the C[F.sub.4] decomposition efficiency is investigated for three simulated plasma reactors: needle-plate reactor (NPR); metal-particle reactor (MPR); and dielectric-barrier reactor with hole (DBH). The C[F.sub.4] decomposition efficiency by DBH is much better than that by NPR or MPR. When applied voltage is increased up to the critical voltage for spark formation in the all reactors, the C[F.sub.4] decomposition efficiency is increased. The C[F.sub.4] decomposition efficiency in NPR and MPR is about 12% and 22%, respectively, at an applied voltage of 23 kV (consumption power: 110 W) and C[F.sub.4] concentration of 500 p/min, however, the C[F.sub.4] decomposition efficiency is higher than 95% in the case of DBH. The DBH should be much better than two reactors investigated for C[F.sub.4] decomposition. Index Terms--C[F.sub.4], decomposition, dielectric-barrier reactor with hole (DBH), metal-particle reactor (MPR), needle-plate reactor (NPR).