Measurement of thermal conductivity of silicon dioxide thin films using a 3omega method

Authors :: Yamane, Tsuneyuki
Nagai, Naoto
Kayayama, Shin-ichiro
Todoki, Minoru
Source :: Journal of Applied Physics. June 15, 2002, Vol. 91 Issue 12, 9772-9776
Publication Year :: 2002
Abstract: A study was conducted, using a 3omega method, to examine the thermal conductivity of SiO2 thin films prepared using various procedures. The result reveals that the thermal conductivity of the SiO2 thin films correlates closely with their porosity.

Subjects :: Heat -- Conduction
Heat -- Research
Porosity -- Properties
Porosity -- Research
Thin films -- Properties
Thin films -- Research
Dielectric films -- Properties
Dielectric films -- Research
Physics

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