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Kinetics study for the reactions of Si atoms with SiH4
- Source :
- Journal of Physical Chemistry A. June 19, 2003, Vol. 107 Issue 24, 4838-4842
- Publication Year :
- 2003
-
Abstract
- Rate constants for the reactions of Si (3P, 1D, 1S) atoms with SiH4 are obtained using a combined laser photolysis/laser induced fluorescence technique. The results of the density functional theory calculations show that the reaction of Si(3P) atoms with SiH4 proceeds via a loose transition state.
Details
- Language :
- English
- ISSN :
- 10895639
- Volume :
- 107
- Issue :
- 24
- Database :
- Gale General OneFile
- Journal :
- Journal of Physical Chemistry A
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.123177533