Graphical peak analysis method for determining densities and emission rates of traps in dielectric film from transient discharge current

The graphical peak analysis method (discharge current transient spectroscopy (DCTS)) is proposed and tested for determining the electrically active traps with close emission rates in thin insulator films. Experimentally it has been show that DCTS can determine the densities per unit area and emission rates of traps with five close emission rates in Pb(Zr, Ti)O3 (PZT) thin films.