The effect of carbon and germanium on phase transformation of nickel on Si(sub 1-x-y)Ge(sub x)C(sub y) epitaxial layers

Authors :: Hallstedt, J.
Blomqvist, M.
Persson, P.O.A.
Hultman, L.
Radamson, H.H.
Samuel, Ifor D.W.
Source :: Journal of Applied Physics. March 1, 2004, Vol. 95 Issue 5, p2397, 6 p.
Publication Year :: 2004
Abstract: The phase transformation and sheet resistance of Nickel on single crystalline SiGe(C) layers after annealing treatments at 360-900 degree Celsius is investigated. A large interfacial roughness was obtained in the Ni(SiGe) layers, whereas the Ni(SiGeC) layers demonstrated a smoother surface.

Subjects :: Nickel -- Chemical properties
Germanium -- Chemical properties
Carbon -- Chemical properties
Silicon -- Chemical properties
Phase transformations (Statistical physics) -- Research
Physics

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