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Helicon-wave-excited-plasma sputtering epitaxy of ZnO on sapphire (0001) substrates

Authors :
Chichibu, S.F.
Yoshida, T.
Onuma, T.
Nakanishi, H.
N. Cao
Source :
Journal of Applied Physics. Jan 15, 2002, Vol. 91 Issue 2, p874, 4 p.
Publication Year :
2002

Abstract

A promising epitaxial growth technique, namely helicon-wave-excited plasma sputtering epitaxy (HWPSE), is proposed for the growth of ZnO epilayers. The ZnO epilayer exhibited a dominant near-band-edge photoluminescence (PL) peak at 300 K.

Details

Language :
English
ISSN :
00218979
Volume :
91
Issue :
2
Database :
Gale General OneFile
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
edsgcl.123702192