Composition and orientation dependence of electrical properties of epitaxial Pb(Zr(sub x)Ti(1-x))O(sub 3) thin films grown using metalorganic chemical vapor deposition

Epitaxial Pb(Zr(sub x)Ti(sub 1-x)O3 (PZT) thin films with various x values are prepared on single-crystal substrates, and changes in electrical properties with x value and crystal orientation are systemically investigated. The results suggested that the electrical properties of epitaxial PZT thin films strongly depend on both of the composition and orientation of the films.