Hafnium or zirconium high-k fab cross-contamination issues

MLA

Vermeire, Bert, et al. “Hafnium or Zirconium High-k Fab Cross-Contamination Issues.” IEEE Transactions on Semiconductor Manufacturing, vol. 17, no. 4, Nov. 2004, p. 582. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.124942457&authtype=sso&custid=ns315887.

APA

Vermeire, B., Pandit, V. S., Parks, H. G., Raghavan, S., Ramkumar, K., & Jeon, J. (2004). Hafnium or zirconium high-k fab cross-contamination issues. IEEE Transactions on Semiconductor Manufacturing, 17(4), 582.

Chicago

Vermeire, Bert, Viraj S. Pandit, Harold G. Parks, Srini Raghavan, Krishnaswami Ramkumar, and Joong Jeon. 2004. “Hafnium or Zirconium High-k Fab Cross-Contamination Issues.” IEEE Transactions on Semiconductor Manufacturing 17 (4): 582. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.124942457&authtype=sso&custid=ns315887.