Effects of the top-electrode size on the piezoelectric properties (d(sub 33) and S) of lead zirconate titanate thin films

Authors :: Gerber, P.
Roelofs, A.
Kugeler, C.
Bottger, U.
Waser, R.
Source :: Journal of Applied Physics. Sept 1, 2004, Vol. 96 Issue 5, 2800-2804
Publication Year :: 2004
Abstract: The effects of a decreasing top electrode size on the electric and piezoelectric properties of tetragonal Pb(Zr(sub x), Ti(sub 1-x))O(sub 3) thin films were investigated. Both propertied were found to decrease rapidly with decreasing size of the used Pt top electrode for the investigated dimensions of 5 mm to 100-mu m edge length.

Subjects :: Titanium dioxide -- Electric properties
Titanium dioxide -- Research
Zirconium -- Research
Zirconium -- Electric properties
Lead compounds -- Research
Lead compounds -- Electric properties
Dielectric films -- Research
Thin films -- Research
Physics

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