Monte Carlo simulation of nanocrystalline TiN/amorphous SiN(sub x) composite films

Authors :: Z. -J. Liu
C. H. Zhang
Y. G. Shen
Y. -W. Mai
Source :: Journal of Applied Physics. Jan 15, 2004, Vol. 95 Issue 2, p758, 3 p.
Publication Year :: 2004
Abstract: The microstructures of TiN/SiN(sub x) films were studies by means of a Monte Carlo method. The findings show that the average size of TiN grains decreases with volume fraction of SiN(sub x) approximately according to a power law with a time-dependent exponent decreasing with growth time.

Subjects :: Silicon nitride -- Electric properties
Titanium compounds -- Electric properties
Amorphous semiconductors -- Electric properties
Monte Carlo method -- Usage
Physics

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