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Choosing the right ionization gauge for high-vacuum processes

Authors :
Rutt, Paul M.
Smith, Steven
Source :
Solid State Technology. March 1, 2005, Vol. 48 Issue 3, p39, 3 p.
Publication Year :
2005

Abstract

OVERVIEW The selection of high-vacuum gauge technologies for measurements in pressure-dependent semiconductor processes can affect overall cost and manufacturing yields depending on the application and the environment in tool chambers. […]

Subjects

Subjects :
Standard IC
Integrated circuits -- Production processes
Semiconductor chips -- Production processes
Vacuum-gages -- Usage

Details

Language :
English
ISSN :
0038111X
Volume :
48
Issue :
3
Database :
Gale General OneFile
Journal :
Solid State Technology
Publication Type :
Periodical
Accession number :
edsgcl.131125614

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Authors Abstract Subjects Details