Molecular composition of films and solid particles polymerized in fluorocarbon plasmas

Authors :: Kazuo, Takahashi
Kunihide, Tachibana
Source :: Journal of Applied Physics. Jan 15, 2001, Vol. 89 Issue 2, 893-899
Publication Year :: 2001
Abstract: The X-ray photoelectron spectroscopy (XPS) and gel permeation chromatography (GPC) are used to investigate the fluorocarbon plasmas, formation of mechanisms of polymers. The XPS results showed that that the particles were carbon-rich and composed of highly branch molecules compared to film composition whereas GPC results found that the particles contain ultrahigh mass polymers with molecular weight of 100,000.

Subjects :: Plasma physics -- Research
Dielectric films -- Research
Thin films -- Research
Fluorocarbons -- Optical properties
Physics

Tools