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Single-control design is within reach: the same I/O hardware will work no matter the tool configuration

Authors :
Wong, Lenson
Source :
Design News. June 6, 2005, Vol. 60 Issue 8, p20, 1 p.
Publication Year :
2005

Abstract

What are the challenges facing design engineers in building machinery for semiconductor applications? Semiconductor tools require great precision and repeatable control of complex processes. The stakes are very high as […]

Details

Language :
English
ISSN :
00119407
Volume :
60
Issue :
8
Database :
Gale General OneFile
Journal :
Design News
Publication Type :
Periodical
Accession number :
edsgcl.133485030