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Single-control design is within reach: the same I/O hardware will work no matter the tool configuration
- Source :
- Design News. June 6, 2005, Vol. 60 Issue 8, p20, 1 p.
- Publication Year :
- 2005
-
Abstract
- What are the challenges facing design engineers in building machinery for semiconductor applications? Semiconductor tools require great precision and repeatable control of complex processes. The stakes are very high as […]
Details
- Language :
- English
- ISSN :
- 00119407
- Volume :
- 60
- Issue :
- 8
- Database :
- Gale General OneFile
- Journal :
- Design News
- Publication Type :
- Periodical
- Accession number :
- edsgcl.133485030