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On-chip vacuum generated by a micromachined Knudsen pump
- Source :
- Journal of Microelectromechanical Systems. August, 2005, Vol. 14 Issue 4, p741, 6 p.
- Publication Year :
- 2005
-
Abstract
- This paper describes the design, fabrication, and testing of a single-chip micromachined implementation of a Knudsen pump, which uses the principle of thermal transpiration, and has no moving parts. A six-mask microfabrication process was used to fabricate the pump using a glass substrate and silicon wafer. The Knudsen pump and two integrated pressure sensors occupy an area of 1.5 mm x 2 mm. Measurements show that while operating in standard laboratory conditions this device can evacuate a cavity to 0.46 atm using 80 mW input power. The pumpdown time of an on-chip chamber and pressure sensor cavity with a total volume of 80 000 cubic micrometers is only 2 s, with a peak pump speed of 1 x [10.sup.-6] cc/min. High thermal isolation is obtained between the polysilicon heater and the rest of the device. [1073] Index Terms--High temperature, thermal isolation, thermal transpiration, thermomolecular, vacuum pump.
Details
- Language :
- English
- ISSN :
- 10577157
- Volume :
- 14
- Issue :
- 4
- Database :
- Gale General OneFile
- Journal :
- Journal of Microelectromechanical Systems
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.135339678