Thin film reaction kinetics of niobium/aluminum multilayers

Authors :: Coffey, K.R.
Barmak, K.
Rudman, D.A.
Foner, S.
Source :: Journal of Applied Physics. August 15, 1992, Vol. 72 Issue 4, p1341, 9 p.
Publication Year :: 1992
Abstract: The phase formation kinetics of niobium/aluminum multilayers was investigated using scanning calorimetry, x-ray diffraction and cross-sectional transmission electron microscopy. The results showed that annealing of the Nb/Al structure initially produced an NbAl3 intermetallic. The formation of the NbAl3 was characterized by a two-phase process. An Al5 superconducting phase followed.