10-nm channel length pentacene transistors

Organic thin-film transistors (OTFTs) are fabricated with channel lengths as small as 10nm and an operating voltage of V(sub DD)= -0.3 V using e-beam lithography. Parasitic resistance and contact issues between pentacene and the source/drain contact material resulted in substantial device performance degradation, including a reduction in extrinsically measured transconductance and mobility.