Magnetic properties of Fe-Zr-Co/Fe-Zr-Co-N multilayered films

The magnetic and thermal characteristics of Fe-Zr-Co/Fe-Zr-Co-N multilayered thin films prepared by sputtering and electron cyclotron resonance plasma nitridation were investigated. The results showed that the incorporation of Co to the material dramatically increased its magnetic properties. The soft magnetic properties of the material exhibited excellent stability under heat treatment.