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A new scalable self-aligned dual-bit split-gate charge-trapping memory device

Authors :
Breuil, Laurent
Haspeslagh, Luc
Blomme, Pieter
Wellekens, Dirk
Vos, Joeri De
Lorenzini, Martino
Houdt, Jan Van
Source :
IEEE Transactions on Electron Devices. Oct, 2005, Vol. 52 Issue 10, p2250, 7 p.
Publication Year :
2005

Abstract

A dual-bit trapping device, which solves most of the problems by using a split-gate structure, inspired by the HIMOS concept is presented. The device allows a high density thanks to dual-bit/cell storage and it is easily scalable since the structure is fully self-aligned and the bit areas are physically isolated.

Details

Language :
English
ISSN :
00189383
Volume :
52
Issue :
10
Database :
Gale General OneFile
Journal :
IEEE Transactions on Electron Devices
Publication Type :
Academic Journal
Accession number :
edsgcl.141375057