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Testing self-primed spin-on low-k materials to optimize the cost of ownership

Authors :
Waeterloos, Joost J.
Mills, Michael E.
Source :
Micro. June, 2001, Vol. 19 Issue 6, p53, 5 p.
Publication Year :
2001

Subjects

Subjects :
Standard IC
Semiconductor industry
Company business management
Company financing
Company process management
Dielectrics -- Usage
Dielectrics -- Testing
Integrated circuits -- Production processes
Semiconductor chips -- Production processes
Semiconductor industry -- Production processes
Semiconductor industry -- Management
Semiconductor industry -- Finance

Details

Language :
English
ISSN :
10810595
Volume :
19
Issue :
6
Database :
Gale General OneFile
Journal :
Micro
Publication Type :
Periodical
Accession number :
edsgcl.141610347

Tools

Authors Abstract Subjects Details