Depth-graded multilayers for application in transmission geometry as linear zone plates

Authors :: Chian Liu
Conley, R.
Macrander, A.T.
Maser, J.
Kang, H.C.
Zurbuchen, M.A.
Stephenson, G.B.
Source :: Journal of Applied Physics. Dec 1, 2005, Vol. 98 Issue 11, p113519-1, 6 p.
Publication Year :: 2005
Abstract: The growth and characterization of a depth-graded multilayer suitable for use as a zone plate for hard x-ray focusing is reported. The multilayer has a total of 470 alternating layers of WSi2 and Si with thicknesses increasing monotonically from 15 to 60nm, for a total thickness of 11.33 (mu)m.

Subjects :: Thin films, Multilayered -- Design and construction
X-ray lithography -- Methods
Tungsten compounds -- Chemical properties
Silicon compounds -- Chemical properties
Physics

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